tcp etch
Lam Releases TCP® 9400DFM (Designed For Manufacture) Poly Etch System FREMONT, Calif., July 6, 2000-Lam Research Corporation ...,Lam 9400 TCP Poly Etcher with Envision software; Clean category; for poly and Si etches; maximum etch depth 3um. Lampoly Operating Procedure - Read ...
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 tcp etch 相關參考資料
Dry Etching - Some Special Issues
Ion beam etching (called RIBE for "reactive ion beam etching"). ... Inductively coupled plasma etching, TCP, * Etching relatively independent of loading https://www.tf.uni-kiel.de Lam Releases TCP® 9400DFM (Designed For Manufacture ...
Lam Releases TCP® 9400DFM (Designed For Manufacture) Poly Etch System FREMONT, Calif., July 6, 2000-Lam Research Corporation ... https://investor.lamresearch.c Lam Research 9400 TCP Poly Etcher, lampoly (clean ...
Lam 9400 TCP Poly Etcher with Envision software; Clean category; for poly and Si etches; maximum etch depth 3um. Lampoly Operating Procedure - Read ... https://snf.stanford.edu RELIANT蝕刻產品- Lam Research
DRIE Reactive Ion Etch Reliant Systems ... Kiyo® family (through Kiyo45™); Flex® family (through Flex45™); Exelan® family; DSiE™ family; TCP® 9400 family ... https://www.lamresearch.com TCP 9400SE 多晶矽乾蝕刻機儀器簡介
Factory: Lam RESEARCH CO., LTD.(台灣科林研發). ▫ Machine Type: TCP 9400SE. ▫ Machine Serial No.: 4114. ▫ Process: 0.35 μm Feature Polysilicon Etching. http://www.ndl.org.tw TCP 9400SE 多晶矽乾蝕刻機標準製程
Recipe 內容說明. 本機台蝕刻Poly-Si 採multi-step（Break Through, Main Etch, Over Etch）. BT: 10 秒可蝕刻350-400 Å . ME: 33-38 Å /s, Selectivity of Poly to oxide ... http://www.ndl.org.tw TCP® 9400 Etch - HubSpot
The TCP® 9400 system uses Lam's patented TCP® technology and offers several key benefits for polysilicon etch. The TCP® technology creates an inductively ... http://cdn2.hubspot.net TCP® 9600 Metal Etch - HubSpot
TCP® 9600 Metal Etch. System Reliability. ♢ Uptime ≥ 85%. ♢ MTTC 12 hours. ♢ MTBF ≥ 125 hours. ♢ MTBR ≤ 4 hours. Typical Results. ♢ Al Etch rate ... http://cdn2.hubspot.net 什麼是蝕刻(Etching)？
什麼是蝕刻(Etching)？ 蝕刻是指以 ... 顯著提昇。 TCP9400蝕刻系統使用TCP(Transformer Coupled ... 圖2 多晶矽乾蝕刻機構造之TCP 電漿技術[2]。 圖4 多晶矽乾 ... http://www.ndl.org.tw |