OCD vs CD-SEM
2019年3月15日 — CD SEM. E-test. OCD SA. Implementation of Machine Learning in Metrology for Advanced. Semiconductor Manufacturing M. Shifrin, Semicon Korea, ... ,CD-SEM is a dedicated system for measuring the dimensions of the fine patterns on a semiconductor wafer.
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 OCD vs CD-SEM 相關參考資料
(PDF) Optical Critical Dimension Metrology in Memory and Logic
2019年4月24日 — CD-SEM with sequential etch-back. FIGURE 6. OCD Mueller Matrix off-diagonal response to a. 3D NAND channel hole structure with tilt ... https://www.researchgate.net 3D (in-line) metrology challenges and solutions - CEA-Leti
2019年3月15日 — CD SEM. E-test. OCD SA. Implementation of Machine Learning in Metrology for Advanced. Semiconductor Manufacturing M. Shifrin, Semicon Korea, ... https://www.leti-cea.com 4. CD-SEM - What is a Critical Dimension SEM? - Hitachi High ...
CD-SEM is a dedicated system for measuring the dimensions of the fine patterns on a semiconductor wafer. https://www.hitachi-hightech.c Metrology - Semiconductor Engineering
CD-SEM is a key metrology tool for planar transistors, but at one time, ... This is a popular form of optical critical dimension (OCD) metrology. https://semiengineering.com Metrology for the next generation of semiconductor devices
由 NG Orji 著作 · 2018 · 被引用 131 次 — Keywords: nanometrology, AFM, SEM, CD-SAX, TEM, Scatterometry ... while, optical critical dimension (OCD) metrology relies upon the ... https://www.ncbi.nlm.nih.gov Nikon's New APM-3000 Series Fills Gap Between CD SEM ...
2008年7月15日 — Traditional metrology methods, such as CD SEM and OCD has been used for such measurements, but proved timely and potentially damaging to the ... https://www.microscope.healthc OCD Metrology for Advanced Lithography - NIST
2017年3月22日 — Why Scatterometry (OCD)?. HVM Metrology Gap Analysis (simplified)* local (imaging) ensemble (“spectroscopic”). Application. CD-SEM HV-SEM. https://www.nist.gov OCD study of critical dimension and line-shape control of ...
由 Y Feng 著作 · 2004 · 被引用 5 次 — The critical dimensions of 121 dies extracted by OCD exhibit excellent correlation with those obtained by CD-SEM, with R-squared as high as 0.995 on STI ... https://www.spiedigitallibrary Optical critical dimension (OCD) measurments for profile ...
由 RJ Hoobler 著作 · 2003 · 被引用 16 次 — Optical Critical Dimension (OCD) measurements using Normal-Incidence ... Comparisons will be made with both CD-SEM and X-SEM and the application to ... https://ui.adsabs.harvard.edu |