Optical critical dimension
PDF | On Apr 24, 2019, G Andrew Antonelli and others published Optical Critical Dimension Metrology in Memory and Logic | Find, read and ...,Optical Critical Dimension (OCD) measurements using Normal-Incidence Spectroscopic Ellipsometry (polarized reflectance) allow for the separation of transverse electric and transverse magnetic modes of light reflected from an anisotropic sample as found in
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Optical critical dimension (OCD) measurments for profile ...
https://ui.adsabs.harvard.edu (PDF) Optical Critical Dimension Metrology in Memory and Logic
PDF | On Apr 24, 2019, G Andrew Antonelli and others published Optical Critical Dimension Metrology in Memory and Logic | Find, read and ... https://www.researchgate.net Optical critical dimension (OCD) measurements for profile ...
Optical Critical Dimension (OCD) measurements using Normal-Incidence Spectroscopic Ellipsometry (polarized reflectance) allow for the separation of transverse electric and transverse magnetic modes of... https://www.researchgate.net Optical critical dimension measurement for sourcedrain ...
In modern IC industry, optical critical dimension (OCD) technique has been more and more applied, as one of the most import process control tools. In this work, OCD spectroscopy metrology was used to ... https://ieeexplore.ieee.org Fundamental limits of optical critical dimension metrology: a ...
This paper is a comprehensive summary and analysis of a SEMATECH funded project to study the limits of optical critical dimension scatterometry (OCD). https://www.spiedigitallibrary Optical critical dimension measurement and illumination ...
In this paper we present a unique method of evaluating the angular illumination homogeneity in an optical microscope using the through-focus focus metric. https://www.spiedigitallibrary Nanoscale optical critical dimension measurement of a ...
Highly sensitive optical metrology techniques based on spectroscopic ellipsometry (SE) are required for three dimensional monitoring of line-profiles and ... https://avs.scitation.org |