Dry etching Lam
Products. Plasma Bevel Clean ... 淺溝槽隔離(STI)、閘極、中段(MOL)、以及後段(back-of-line)製程的蝕刻後處理製程(post-etch); 沉積前和沉積後處理製程(pre- and ... ,DRIE Reactive Ion Etch Reliant Systems. Lam Research的整修與新建Reliant產品可為導體、介電層與金屬蝕刻應用提供可靠、通過生產驗證的低成本解決方案。
| 相關軟體 Etcher 資訊 | |
|---|---|
 Dry etching Lam 相關參考資料
Atomic Layer Etch (ALE) Archives - Lam Research
Atomic Layer Etch (ALE) Deep Reactive Ion Etch (DRIE) DRIE. 採用緊湊、高密度的結構設計，Lam Research突破性的Sense.i™平台具備無與倫比的系統智慧，能以最高 ... https://www.lamresearch.com CORONUS系列產品
Products. Plasma Bevel Clean ... 淺溝槽隔離(STI)、閘極、中段(MOL)、以及後段(back-of-line)製程的蝕刻後處理製程(post-etch); 沉積前和沉積後處理製程(pre- and ... https://www.lamresearch.com DRIE Archives - Lam Research
DRIE Reactive Ion Etch Reliant Systems. Lam Research的整修與新建Reliant產品可為導體、介電層與金屬蝕刻應用提供可靠、通過生產驗證的低成本解決方案。 https://www.lamresearch.com Introduction to Plasma Etching - Willson Research Group
Lam Research Corp. 5. ▻ Etching in general is very complex! ▻ Advanced plasma etch chambers are equipped with a lot of “knobs” for. https://willson.cm.utexas.edu KIYO系列產品
KIYO系列產品. Products. Atomic Layer Etch (ALE) Reactive Ion Etch ... Lam Research的Kiyo®系列產品能以高生產力提供精密、穩定形成這些導體結構所需的優異效能。 https://www.lamresearch.com Lam Revolutionizes Chipmaking Process with New Plasma ...
2020年3月3日 — Building on four decades of etch industry leadership, Lam today launched a new plasma etch technology and system solution. https://blog.lamresearch.com VERSYS METAL 系列產品
Products. Reactive Ion Etch ... 為了實現這些關鍵的蝕刻步驟，Lam Research的Versys® Metal 系列產品提供了一個兼具高生產力與製程彈性的平台。 https://www.lamresearch.com 光阻去除與晶圓清洗產品 - Lam Research
Technologies include dry plasma strip (GxT, G400, G3D), wet clean/spin clean (DV-Prime, Da Vinci, SP series), and plasma bevel clean (Coronus family). https://www.lamresearch.com 我們的產品
Kiyo Product Family. Atomic Layer Etch (ALE)Reactive Ion Etch (RIE). These market-leading conductor etch products ... https://www.lamresearch.com 電漿蝕刻產品
KIYO系列產品. Atomic Layer Etch (ALE) Reactive Ion Etch. Lam Research領先市場的導體蝕刻產品能以 ... https://www.lamresearch.com |