swing curve
Swing Curve Effect from Shipley. • Another source of CD variation due to changing resist thickness: interference effect. This effect is peculiar to ...,Resist swing curves have been constructed practically, and by lithography modeling, for a conventional I-line resist both for dimensions at the substrate interface ...
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 swing curve 相關參考資料
swing curve - 搖擺曲線 - 國家教育研究院雙語詞彙
出處/學術領域, 英文詞彙, 中文詞彙. 學術名詞 海事, swing curve, 搖擺曲線. 學術名詞 電力學名詞-兩岸電力學名詞, swing curve, 搖擺曲線. 學術名詞 電力工程 http://terms.naer.edu.tw Swing Curve Effect
Swing Curve Effect from Shipley. • Another source of CD variation due to changing resist thickness: interference effect. This effect is peculiar to ... http://myplace.frontier.com Swing curve phase and amplitude effects in optical lithography
Resist swing curves have been constructed practically, and by lithography modeling, for a conventional I-line resist both for dimensions at the substrate interface ... https://www.spiedigitallibrary Swing Curves
Generically, a swing curve is the sinusoidal variation of some lithographic parameter with resist thickness. There are several parameters which vary in this way, but ... http://lithoguru.com Swing Curves - SPIE Digital Library
Swing Curves. Generically, a swing curve is the sinusoidal variation of some lithographic parameter (e.g., linewidth, dose to clear, or reflectivity) with resist ... https://www.spiedigitallibrary Swing Curves and the Process Window
Swing curves are caused by interference between light reflected off the top of the photoresist and light which travels through the resist, bounces off the substrate ... http://www.lithoguru.com 國立交通大學機構典藏- 交通大學
曝光過程中接受到的總能量會有所不同，造成曝光製程不穩定而影響CD，. 此現象稱為光阻擺動趨勢(Swing Curve)。 圖2-6 CD-SEM 量測方式圖. Mask Linearity. 0.2. https://ir.nctu.edu.tw |