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 lam flex fx 相關參考資料
FLEX系列產品- Lam Research
為了精確形成高難度的特徵結構，Lam Research的Flex®系列產品可為關鍵的蝕刻製程應用提供具差異化的技術以及應用導向的功能。針對某些應用，透過我們 ... https://www.lamresearch.com LAM 2300 Exelan Flex Oxide Etch Chamber PM Technique
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