in-situ steam generation
OVERVIEW in situ steam generation is a new oxidation technology for single-wafer RTP. Its process parameters can be controlled very precisely, and it provides ... ,The In-Situ Steam Generation (ISSG) process addresses the limitations of other thermal oxidation methods through minimal consumption of the active area while ...
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 in-situ steam generation 相關參考資料
In situ steam generation (ISSG) versus standard steam ...
In order to grow ultra-thin oxides with a homogenous thickness the oxidation process has to be changed from an oxide grown in furnace environment (FURN) to an ... https://www.sciencedirect.com In situ steam generation: A new rapid thermal oxidation ...
OVERVIEW in situ steam generation is a new oxidation technology for single-wafer RTP. Its process parameters can be controlled very precisely, and it provides ... https://go.gale.com In-situ steam generation for shallow trench isolation in sub ...
The In-Situ Steam Generation (ISSG) process addresses the limitations of other thermal oxidation methods through minimal consumption of the active area while ... https://ieeexplore.ieee.org US20020146914A1 - In-situ steam generation process for ...
A N 2 O in-situ steam generation (N 2 O-ISSG) process for forming an ultra-thin nitrided oxide layer is provided. The N 2 O-ISSG process includes placing a ... https://patents.google.com 國立交通大學機構典藏：臨場蒸氣產生技術(ISSG)應用於鎢奈米 ...
標題: 臨場蒸氣產生技術(ISSG)應用於鎢奈米點非揮發性記憶體之研究. Study of In-Situ Steam Generation (ISSG) for Tungsten Nanocrystal Non-Volatile Memory. https://ir.nctu.edu.tw 如何引用預刊文章？ - 華藝線上圖書館
本文中所研究的二氧化矽薄膜是以原處蒸汽產生(in-situ steam generation)法為基礎的快速熱處理(RTP)系統所成長的。由實驗的結果顯示，稀釋蒸汽的快速熱氧化法 ... http://www.airitilibrary.com 臨場濕式氧化方法在金屬鎢奈米點非揮發性記憶體之製作與研究
The in-situ-steam-generation-process (ISSG) oxidation process is a wet oxidation with some hydrogen introduced in it. It has a faster oxidation rate than dry ... https://ir.nctu.edu.tw |