antenna effect
A side effect of the manufacturing process that leads to damaged parts is known as the antenna effect. Under certain conditions, plasma etchers or ion implanters induce charge onto various structures that connect to a gate of a transistor. The induced cha,The "antenna effect" is a common name for the effects of charge accumulation in isolated nodes of an integrated circuit during its processing. This effect is also sometimes called "Plasma Induced Damage", "Process Induced Damage&q
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 antenna effect 相關參考資料
Antenna effect - Wikipedia
The antenna effect, more formally plasma induced gate oxide damage, is an effect that can potentially cause yield and reliability problems during the manufacture of MOS integrated circuits. Fabs norma... https://en.wikipedia.org Antenna Effect in Cmos Layout - Scribd
A side effect of the manufacturing process that leads to damaged parts is known as the antenna effect. Under certain conditions, plasma etchers or ion implanters induce charge onto various structures ... https://www.scribd.com Antenna effect: Do the design rules really protect us? | EE Times
The "antenna effect" is a common name for the effects of charge accumulation in isolated nodes of an integrated circuit during its processing. This effect is also sometimes called "Plas... https://www.eetimes.com antenna effects.pdf
8/5/2004. 4. Plasma Induced Damage (PID) = Antenna Effect. • Occurs during manufacturing process. • Antennae are floating conduction layers without shielding layer of oxide [16]. -effects poly and me... http://ssal.kaist.ac.kr VLSI } 008 } Antenna Effects } - YouTube
This lecture discusses concept of antenna effect in vlsi physical design. A typical chip manufacturing steps ... https://www.youtube.com VLSI } Antenna Effects } - YouTube
This lecture discusses concept of antenna effect in vlsi physical design. A typical chip manufacturing steps ... https://www.youtube.com vol.159 - 國研院晶片中心
(一) 天線效應(antenna effect). 天線效應是電漿製程(乾蝕刻)中常見到的負面效應，有可能會明顯的降低晶片良率。簡. 而言之，是由於電漿製程中出現大量電荷，不正常累積於電晶體閘極(Gate)上的金屬層，導. 致閘極介電層的電場增強，電荷會穿越閘極，可能穿破氧化層(gate oxid)而造成損害，損壞的. 機率與氧化層厚度也有關係。 http://www.cic.org.tw 「antenna effect」的圖片搜尋結果
:// 不重要的事件簿: Antenna Effect
在半導體製造過程當中，電漿蝕刻(Plasma Etching)時，若金屬層(導體層Metal/Polysilicon)累積了過多的電荷，將會導致了不正常路徑隨機放電，而永久損害了元件（MOS），也因為金屬層的行為就如同天線收集了電荷，因而稱為Antenna Effect。累積的電荷隨暴露的面積增加而越大。這種不良的效應會導致產品在製造 ... http://ibclu.blogspot.com 製程蝕刻跟antenna的問題| Yahoo奇摩知識+
會有詳細的介紹... 2010-10-21 12:45:30 補充： 良率和可靠度的損失...更正錯字.. 2010-10-21 12:54:09 補充： 嚴格的說... 只要在製程上有用到電漿的都會有這個問題... ion 累積在interconnect 上..最後產生電場擊毀gate oxide... 這是最嚴重的後果.. 有一種較輕微的antenna effect 則是電荷累積在gate o... https://tw.answers.yahoo.com |