KLA defect inspection

Unpatterned Wafer Defect Inspection Systems. The Surfscan® unpatterned wafer inspection systems identify defects and sur...

KLA defect inspection

Unpatterned Wafer Defect Inspection Systems. The Surfscan® unpatterned wafer inspection systems identify defects and surface quality issues that affect the ... ,Candela® defect inspection systems detect and classify a wide range of critical defects on compound semiconductor substrates (GaN, GaAs, InP, sapphire, SiC, ...

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KLA defect inspection 相關參考資料
Defect Inspection & Review | Chip Manufacturing - KLA-Tencor

Defect Inspection and Review. KLA's defect inspection and review systems cover the full range of yield applications within the chip and wafer manufacturing ...

https://www.kla-tencor.com

Defect Inspection - KLA-Tencor

Unpatterned Wafer Defect Inspection Systems. The Surfscan® unpatterned wafer inspection systems identify defects and surface quality issues that affect the ...

https://www.kla-tencor.com

Candela Defect Inspectors | GaN SiC Wafer Inspection - KLA ...

Candela® defect inspection systems detect and classify a wide range of critical defects on compound semiconductor substrates (GaN, GaAs, InP, sapphire, SiC, ...

https://www.kla-tencor.com

Wafer Inspection and Metrology for Advanced Packaging | KLA

All-Surface Wafer Defect Inspection, Metrology and Review Cluster System ... CIRCL™-AP is a cluster tool with multiple modules, covering all-surface inspection, ...

https://www.kla-tencor.com

New Defect Inspection System for SiC, GaN Substrates - KLA ...

2020年8月27日 — Today KLA Instruments announced the Candela® 8520 defect inspection system for power device applications. It is the successor to the ...

https://www.kla-tencor.com

Surfscan® SP7XP: Detecting Defects Drives Pristine Processes

2020年12月7日 — KLA Corporation's new Surfscan® SP7XP unpatterned wafer defect inspection system supports advanced logic and memory chip manufacturing.

https://www.kla-tencor.com

Defect Discovery | Chip Manufacturing - KLA-Tencor

Innovative Technologies. Extraordinary defect discovery starts with illuminating nanoscale defects. Our optical inspectors leverage broadband light sources ...

https://www.kla-tencor.com

eSL10 e-Beam Defect Inspection | Chip Manufacturing - KLA ...

This complexity demands innovative defect inspection solutions. The eSL10™ e-beam patterned wafer defect inspection system captures and identifies defects ...

https://www.kla-tencor.com