polysilicon etching
Wet etching starting from a hydrophilic polysilicon surface showed successful polysilicon removal (no residues) compared with a hydrophobic ...,In this paper, investigations of chlorine-based plasmas generated by an electron cyclotron resonance (ECR) reactor for poly-Si etching is studied. The influences ...
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 polysilicon etching 相關參考資料
Anisotropic polysilicon etching process - LSI Logic Corporation
An anisotropic polysilicon etching process in Cl 2 /HBr/He is disclosed. The use of HBr allows etching to occur under high poly:oxide selectivity ... https://www.freepatentsonline. Characterization and removal of polysilicon residue during ...
Wet etching starting from a hydrophilic polysilicon surface showed successful polysilicon removal (no residues) compared with a hydrophobic ... https://www.sciencedirect.com Dry etching of polysilicon with high selectivity using a chlorine ...
In this paper, investigations of chlorine-based plasmas generated by an electron cyclotron resonance (ECR) reactor for poly-Si etching is studied. The influences ... https://www.sciencedirect.com Highly selective etching for polysilicon and etch-induced ...
The investigations of polysilicon etching with three halogen-bearing plasmas (SF6, Cl-2, and HBr) in an electron-cyclotron-resonance reactor have been made. https://ir.nctu.edu.tw Highly selective etching for polysilicon and etch‐induced ...
The investigations of polysilicon etching with three halogen‐bearing plasmas (SF6, Cl2, and HBr) in an electron‐cyclotron‐resonance reactor have been made. https://aip.scitation.org Polysilicon wet etch: View - MEMS Exchange
Etch rate, 3100 Å/min. Etchant. Solutions and their concentrations. HNO3/H2O/HF [50:20:1]. Material, polysilicon. Selectivity. Primary material removal rate ... https://www.mems-exchange.org S imultaneous etching of polysilicon materials with different ...
The feasibility of simultaneously etching n , p , and undoped polysilicon (poly-Si) materials by a commercial transformer coupled plasma (TCP) reactor has been ... https://ir.nctu.edu.tw The Use of HBr in Polysilicon Etching - Pall Corporation
(HBr) in the etching of polysilicon and the effects of. HBr purification in this process. First, the basics of semiconductor etching and plasma etching are reviewed. https://www.pall.com 國立交通大學機構典藏：Dry etching of polysilicon with high ...
In this paper, investigations of chlorine-based plasmas generated by an electron cyclotron resonance (ECR) reactor for poly-Si etching is studied. The influences ... https://ir.nctu.edu.tw |