issg oxidation
The ISSG process has shown significant improvement in process results for applications such as ultra-thin gate oxidation and shallow trench isolation (STI) liner ... ,during oxidation on the quality of the in-situ steam generated. (ISSG) oxide. Our results indicate the reliability of ISSG oxide is considerably improved as the H2 ...
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 issg oxidation 相關參考資料
Exploring ISSG process space [Si oxidation] - IEEE Xplore
This paper describes a computational-modeling effort that investigates silicon oxidation using In-Situ Steam Generation (ISSG). Using a fluid-mechanical bo. https://ieeexplore.ieee.org In situ steam generation: A new rapid thermal oxidation ...
The ISSG process has shown significant improvement in process results for applications such as ultra-thin gate oxidation and shallow trench isolation (STI) liner ... https://go.gale.com ISSG - Advanced Silicon Device and Process Laboratory
during oxidation on the quality of the in-situ steam generated. (ISSG) oxide. Our results indicate the reliability of ISSG oxide is considerably improved as the H2 ... http://nanosioe.ee.ntu.edu.tw 博碩士論文行動網
論文名稱: 臨場蒸氣產生技術(ISSG)應用於鎢奈米點非揮發性記憶體之研究 ... In addition, during the ISSG oxidation process, hydrogen is introduced into the ... https://ndltd.ncl.edu.tw 國立交通大學機構典藏：臨場蒸氣產生技術(ISSG)應用於鎢奈米 ...
We fabricated tungsten nanocrystals under various ISSG process conditions, including the oxidation temperature, the process time and the hydrogen concentration ... https://ir.nctu.edu.tw 臨場濕式氧化方法在金屬鎢奈米點非揮發性記憶體之製作與研究
The in-situ-steam-generation-process (ISSG) oxidation process is a wet ... references have demonstrated that ISSG oxide shows much better reliability property. https://ir.nctu.edu.tw 超薄閘極介電層與高介電閘極介電層於CMOS製程技術之研究
而且ISSG二氧化矽也比乾式快速熱氧化法所長出之二氧化矽(dry RTO oxide)具有更好的 ... And the post-annealing effects of ISSG oxide in N2 and nitric oxide (NO) ... https://www.airitilibrary.com |