dpn process
在DPN HD (高純度解耦電漿氮化) 氮化過程中，用低能量脈衝式電漿將氮注入氧化矽介電質，在閘極堆疊的氮氧化物/多晶矽介面產生所需要的高氮濃度，並維持在矽/ ... , The DPN* system delivers a robust integrated plasma nitridation and anneal process sequence that, for logic devices, allows equivalent oxide ...
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 dpn process 相關參考資料
Applied Materials Launches Innovative Nitridation Technology ...
https://www.businesswire.com Centura® DPN HD 高純度解耦電漿氮化閘極堆疊| Applied ...
在DPN HD (高純度解耦電漿氮化) 氮化過程中，用低能量脈衝式電漿將氮注入氧化矽介電質，在閘極堆疊的氮氧化物/多晶矽介面產生所需要的高氮濃度，並維持在矽/ ... http://www.appliedmaterials.co Applied Materials' New DPN System Clears the Path to 65nm ...
The DPN* system delivers a robust integrated plasma nitridation and anneal process sequence that, for logic devices, allows equivalent oxide ... http://www.appliedmaterials.co 國立交通大學機構典藏- 交通大學
For DPN process, the most important process parameter is the concentration of ... 以DPN 技術來製造的電漿氮化閘極介電層（plasma nitrided gate dielectric）為 ... https://ir.nctu.edu.tw Decoupled Plasma Nitridation of Ultrathin Gate Oxides for 65 ...
a decoupled plasma nitridation technique (DPN). This. process allows incorporating a large dose of nitrogen at. the silica top surface leading to thinner equivalent oxide. thickness (EOT), reduced gat... https://www.electrochem.org 在PDA 和DPN氮化製程下28奈米HKMG pMOSFETs元件之電 ...
... 以及使用含氮化去耦合電漿(DPN)製程和沉積後高溫退火製程元件(PDA)，應用在HZH的退火中，探討此等HK/MG pMOSFETs 元件電特性，並比較 ... https://ndltd.ncl.edu.tw plasma nitridation optimization for sub-15 gate dielectrics
The DPN gate stack process consists of three steps: growth of a high quality oxide, plasma nitridation and a high temperature anneal. Sub-100 nm n- and p-MOS ... https://pdfs.semanticscholar.o (PDF) Plasma nitridation of very thin gate dielectrics
DPN process conditions used. The normalized peak transconductance of RPN and DPN-nitrided gate dielectrics depends on. the detailed ... https://www.researchgate.net Trend of subthreshold swing with DPN process ... - IEEE Xplore
Although decoupled plasma nitridation (DPN) post high-k dielectric deposition shows the better threshold voltage shift than post deposition anneal (PDA), t. https://ieeexplore.ieee.org |