ccp plasma
Capacitively coupled plasma is a plasma generated between two electrodes while reactive gases are fed into the chamber. The electrodes form the parallel ... ,由 Y SAKAMOTO 著作 · 2009 · 被引用 8 次 — Among several types of PECVDs, radio frequency (RF) excited capacitively coupled plasma (CCP), and inductively coupled plasma (ICP) have been used in many ...
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Capacitively coupled plasma - Wikipedia
A capacitively coupled plasma (CCP) is one of the most common types of industrial plasma sources. It essentially consists of two metal electrodes separated ... https://en.wikipedia.org Capacitively Coupled Plasma Etching (CCP)
Capacitively coupled plasma is a plasma generated between two electrodes while reactive gases are fed into the chamber. The electrodes form the parallel ... https://snfexfab.stanford.edu Comparison of Plasma Parameters in CCP and ICP ...
由 Y SAKAMOTO 著作 · 2009 · 被引用 8 次 — Among several types of PECVDs, radio frequency (RF) excited capacitively coupled plasma (CCP), and inductively coupled plasma (ICP) have been used in many ... http://www.jspf.or.jp Low Pressure RF Plasma Sources for Industrial Applications ...
Capacitive Coupled Plasmas (CCP) at 13.56 MHz were the first in plasma processing applications. In CCP the discharge current and plasma density are ... http://doeplasma.eecs.umich.ed Physics of High-Density Radio Frequency Capacitively ...
由 Y Ohtsu 著作 · 2018 · 被引用 4 次 — Especially, a capacitively coupled plasma (CCP) is the most popular discharge because the equipment is very simple and almost maintenance ... https://www.intechopen.com Voltage distribution over capacitively coupled plasma ...
由 M Shuto 著作 · 2013 · 被引用 1 次 — When capacitively coupled plasma (CCP) is used to generate large-area plasma, the standing wave effect becomes significant, which results in ... https://nanoscalereslett.sprin 國立交通大學機械工程研究所碩士論文
由 廖木生 著作 · 2004 · 被引用 1 次 — electron collision rate and parameter of plasma etching equipment which ... Plasma，CCP）陸續被發表出來，1980 年代晚期至1990 年代初期，. https://ir.nctu.edu.tw 感應耦合電漿- 維基百科，自由的百科全書
參考文獻[編輯]. 腳注. ^ 感應耦合電漿質譜分析儀（Inductively coupled plasma mass spectrometry ... https://zh.wikipedia.org |