Novellus PECVD
2011年7月7日 — About Novellus' PECVD Technology: The multi-station sequential processing (MSSP) architecture of Novellus' VECTOR platform allows for ... ,2011年7月1日 — About Novellus' PECVD Technology: The multi-station sequential processing (MSSP) architecture of Novellus' VECTOR system provides industry ...
| 相關軟體 Etcher 資訊 | |
|---|---|
 Novellus PECVD 相關參考資料
Basic PECVD Plasma Processes (SiH based)
The causes of film stress can be visualised by imagining what happens when too many atoms are packed into the film - bond lengths are pushed shorter than ... https://nanolab.berkeley.edu NOVELLUS SHIPS 100TH VECTOR EXTREME SYSTEM ...
2011年7月7日 — About Novellus' PECVD Technology: The multi-station sequential processing (MSSP) architecture of Novellus' VECTOR platform allows for ... https://investor.lamresearch.c Novellus ships PECVD LED system to China SemiLEDs ...
2011年7月1日 — About Novellus' PECVD Technology: The multi-station sequential processing (MSSP) architecture of Novellus' VECTOR system provides industry ... https://www.ledsmagazine.com NOVELLUS SYSTEMS INTRODUCES VECTOR EXTREME ...
2011年1月25日 — About Novellus' PECVD Technology: The multi-station sequential processing (MSSP) architecture of Novellus' VECTOR platform allows for ... https://investor.lamresearch.c NOVELLUS SYSTEMS SHIPS 1000TH VECTOR® PECVD ...
2010年2月1日 — San Jose, California - February 1, 2010 - Novellus Systems (NASDAQ: NVLS) today announced that it has shipped the company's 1000th ... https://investor.lamresearch.c PECVD技術突破Novellus新平台提高40%生產速度
2007年5月17日 — 透過多平台順序處理(MSSP)結構縮短薄膜沉積時間，據稱該平台可將製程生產速度提高40%。 Novellus的VECTOR系列PECVD平台已歷經三個 ... https://archive.eettaiwan.com VECTOR系列產品- Lam Research
PECVD技術通常用於這些製程。例如，在3D NAND設計中，遠超過100對交替薄膜層的原位(in-situ) PECVD沉積需要能夠緊密控制每 ... https://www.lamresearch.com 產品介紹 - 亦立科技-EZ Semiconductor Service Inc,
... LAM (Novellus) CVD systems. Platform : Concept 1 / Concept 2; Chamber : Vector / Sequel express / Sequel / Speed / Altus; Application: HDPCVD / PECVD / ... https://ez-tech.com.tw 薄膜沉積產品 - Lam Research
2018年8月13日 — 電漿輔助CVD (PECVD)、高密度電漿CVD (HDP-CVD) 和ALD用於形成可隔離和保護所有這些電性結構的關鍵絕緣層。 針對各種的材料與嚴苛的 ... https://www.lamresearch.com |